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Aug 06, 2026
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NANO 111 - Materials Safety and Equipment Overview for Nanotechnology
PREREQUISITES/COREQUISITE: NANO 100 - Fundamentals of Nanotechnology .
PROGRAM: Nanotechnology
CREDIT HOURS MIN: 3
LECTURE HOURS MIN: 2
LAB HOURS MIN: 2
DATE OF LAST REVISION: Spring, 2019
This course provides an overview of materials, equipment, and safety protocols encountered in the practice of “top down” and “bottom up” nanofabrication. It focuses on safety, environmental and health issues in equipment operation and materials chemistry and handling. The course also covers cleanroom protocol and vacuum technology. Topics to be covered include: vacuum technology, basic chemistry concepts, cleanroom operation, lab standard safety training, health issues, and environmental concerns.
MAJOR COURSE LEARNING OBJECTIVES: Upon successful completion of this course the student will be expected to:
- Fully be aware of safety protocols in laboratory environments and cleanrooms.
- Understand vacuum systems.
- Be knowledgeable of materials used in nanotechnology.
- Demonstrate proficiency in using optical microscope, ellipsometer and profilometer.
COURSE CONTENT: Topical areas of study include -
- Safety and Environmental Concerns
- Vacuum Function, Operation and Systems
- Materials Overview
- General Processing Concerns, Contamination, and Damage
- Basic Characterization Tools
Course Addendum - Syllabus (Click to expand)
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