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Aug 06, 2026
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EECT 155 - Introduction to Vacuum Technology
PROGRAM: Electronics and Computer Technology
CREDIT HOURS MIN: 3
LECTURE HOURS MIN: 2
LAB HOURS MIN: 2
TOTAL CONTACT HOURS MIN: 64
DATE OF LAST REVISION: Fall 2025
This course will introduce the principles, components, and operation of vacuum systems used in semiconductor fabrication and thin-film processing. Students will learn how vacuum pressure, gas flow, and contamination control affect deposition and etching performance. Additional topics will include gas laws, outgassing, high vacuum production, leak and contamination detection, system design, preventive maintenance, and residual gas analysis (RGA) techniques. Laboratory activities will emphasize pump-down procedures, pressure measurement, leak testing, and the operation of thin-film equipment.
MAJOR COURSE LEARNING OBJECTIVES:
- Explain the role of vacuum technology in semiconductor fabrication and thin-film deposition.
- Identify the behavior of materials under vacuum.
- Calculate vacuum levels, pumping speed, and gas throughput for vacuum process chambers.
- Operate mechanical, turbomolecular, and dry-pump systems safely.
- Classify the different vacuum regimes.
- Perform partial pressure analysis using a residual gas analyzer (RGA).
- Perform basic leak detection and contamination control in vacuum systems.
- Conduct pump-down and vent-up operations following cleanroom protocols.
- Apply preventive maintenance and calibration procedures for vacuum equipment.
- Document laboratory results and communicate findings using industry standard reporting methods.
COURSE CONTENT: Topical areas of study include -
- Vacuum system pressure, flow, and molecular behavior
- Pressure measurement instrumentation
- Vacuum system design
- Roughing and high vacuum pumps
- Vacuum classification
- Valves, seals, fittings, and vacuum materials
- Leak detection and contamination control
- Residual gas analysis
- Maintenance, troubleshooting, failure analysis, and repair
- Pump down curves, conductance, and system optimization
- Vacuum safety
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