MEMS 101 - Introduction to Microsystems

PROGRAM: Electronics and Computer Technology/Electrical Engineering Technology
CREDIT HOURS MIN: 3
LECTURE HOURS MIN: 2
LAB HOURS MIN: 2
DATE OF LAST REVISION: Fall 2021

This course will introduce Microelectromechanical Systems construction and their use in systems today. Experiments will be used throughout this course that introduces the methods used to construct MEMS devices with the various process steps. Theories and practices associated with the construction and use of sensor, actuators and transducers will be discussed. Process steps in the creation of MEMS devices will be discussed as well as the use of cleanrooms and cleanroom equipment and processes.

MAJOR COURSE LEARNING OBJECTIVES:

Upon successful completion of this course the student will be expected to:

Explain historical perspective of MEMS development and key milestones.
Outline current and future application trends and commercialization.
Evaluate terminology used in this broad field.
Summarize micro sensors and transducers.
Experiment with basic MEMS processes such as LIGA, Bulk, and Surface Micromachining.
Make use of web based MEMS research.
Define microsystems design concepts.

COURSE CONTENT: Topical areas of study include -

Course Introduction
MEMS Applications Overview
History of MEMS
Micro Vs Nano
The Scale of Things
Transducers and Actuators
Cantilevers Principals
Cantilever Applications
MEMS Careers and Commercialization Concepts
Fabrication Overview
Surface, Bulk and LIGA micromachining
Materials - Amorphous, Crystalline and Poly
Cleanroom Safety and Protocol
Deposition Oxide Growth, PVD, CVD Processes
Photolithography Coat, Expose, Develop, Inspection
Etch Wet, Dry, Isotropic Anisotropic

GRADING POLICY

A……………90-100

B…………….80-89

C…………….70-79

D……………60-69

F…………….0-59

Course Addendum - Syllabus (Click to expand)

Costs

Payments

MEMS 101 - Introduction to Microsystems