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Nov 04, 2026
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NANO 203 - Basic Nanotechnology Processes
PREREQUISITES: NANO 111 - Materials Safety and Equipment Overview for Nanotechnology
PROGRAM: Nanotechnology
CREDIT HOURS MIN: 3
LECTURE HOURS MIN: 2
LAB HOURS MIN: 2
DATE OF LAST REVISION: Spring, 2019
This course is the hands-on introduction to the additive and subtractive processes involved in “top down”, “bottom up”, and hybrid nanofabrication. The majority of the course details a step-by-step description of the equipment, facilities processes and process flow needed to fabricate devices and structures. This hands-on exposure covers basic nanofabrication processes including, self-assembly, lithography, wet and dry etching, physical vapor deposition, and chemical vapor deposition.
MAJOR COURSE LEARNING OBJECTIVES: Upon successful completion of this course the student will be expected to:
- Be knowledgeable of top-down, bottom-up and hybrid nanofabrication.
- Know pattern transfer, wet etching, chemical vapor deposition and physical deposition.
- Be able to run AFM in contact mode.
- Become familiar with scanning electron microscopy.
- Understand the steps involved in lithography.
COURSE CONTENT: Topical areas of study include -
- An Introduction to Processing
- An Introduction to Basic Pattern Transfer
- An Introduction to Wet Etching
- An Introduction to Uses of Plasmas in Processing
- Chemical Vapor Deposition
- Physical Deposition
Course Addendum - Syllabus (Click to expand)
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