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Aug 06, 2026
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NANO 206 - Materials Modification in Nanotechnology
PREREQUISITES: NANO 111 - Materials Safety and Equipment Overview for Nanotechnology , and NANO 203 - Basic Nanotechnology Processes , and NANO 204 - Materials in Nanotechnology .
PROGRAM: Nanotechnology
CREDIT HOURS MIN: 3
LECTURE HOURS MIN: 2
LAB HOURS MIN: 2
DATE OF LAST REVISION: Spring, 2019
This course will cover in detail the processing techniques and specialty hardware used in modifying properties in nanofabrication. Material modification steps to be covered will include etching, functionalization, oxidation, stress control and doping. Avoiding unintentional materials modification will also be covered as well as hands-on materials modification and subsequent characterization.
MAJOR COURSE LEARNING OBJECTIVES: Upon successful completion of this course the student will be expected to:
Have strong knowledge in processes involved in modification of materials properties including:
- Fully understand and perform photolithography.
- Have strong knowledge in particle beam lithographic techniques.
- Understand probe pattern generation and microcontact printing.
- Have strong knowledge in stamp lithography.
- Understand self-assembled lithography.
COURSE CONTENT: Topical areas of study include -
- Material Fabrication Utilizing Plasma Enhanced Chemical Vapor Deposition (PECVD)
- Material Fabrication Utilizing Dry Etch Chemistry
- Advanced Etch Systems
- Oxidation and Dielectric Materials
- Organic Solar Cells
Course Addendum - Syllabus (Click to expand)
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